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Building Value Through SafetyHigh-purity fluid system for advanced chip manufacturing
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Facility

SGDS
Specialty Gas Delivery System
BGDS
Bulk Gas Delivery System
HFPRS
High-Flow Pressure Reduction System
CAC
Common Auxiliary Components

GC

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GR

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VMB

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VMP

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MIXER

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BSGS

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BSGR

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BUSBAR

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1.quality control:

CQC

2.Heaters&Chillers:

HEATING JACKET

HEATING BLOCK

CHILLER

3.Heating Controllers:

SMALL SINGLE-POINT HEATING CONTROLLER

Heating Controller- 4 POU

Multi-Point Heating Controller

4.Control & Safety Device:

ISO Control Cabinet

Cylinder-Guard

Shutboy

5.Piping Connection Components & Others：

PIG TAIL

Valve Manifold

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It can achieve continuous and uninterruptedsafe supply of electronic-grade specialtygases at high flow rates and is mainlycontrolled by PLC. The touch screen is thehuman-machine interface.

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