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High-purity fluid system for advanced chip manufacturing
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The comprehensive solutions provided by SUNTO for the semiconductor industry cover most aspects of semiconductor production

Semiconductor manufacturing is highly sophisticated. High-purity fluid stability directly impacts chip yield. SUNTO’s solutions ensure stable delivery, reduce defects, and improve yield with full-process support.

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High Purity

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Stability

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Yield improvement Rate

Semiconductor
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Application Cases

the client’s new plant expansion

Our system enables full-chain digital monitoring from gas source to process tools, securing continuous leak-free high-purity fluid feed for production. Since launch, stable operation cuts O&M costs and lifts client production yield and efficiency.

  • Bulk gas supply systems
  • Chemical supply and recovery systems
  • Complementary SGLM intelligent gas lifecycle management system

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It can achieve continuous and uninterruptedsafe supply of electronic-grade specialtygases at high flow rates and is mainlycontrolled by PLC. The touch screen is thehuman-machine interface.

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