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ISO Control Cabinet

This multi-channel cabinet centralizes purge, vacuum and pressure monitoring with emergency stop. It uses high-purity gas paths for semiconductor, optoelectronic fabs, matching bulk inert & carrier gases for cylinder cabinets and MOCVD, etching processes.

Home Facility CAC ISO Control Cabinet
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Integrated Complex Equipment
Background Equipment

Characteristics

  • ◆ Multi-channel integrated gas circuit layout with independent control for each pipeline
  • ◆ Equipped with pressure gauge and central emergency stop button for one-cut-off of all gas paths
  • ◆ Supports centralized purging, vacuuming and replacement operation of multiple cylinders
  • ◆ Standard ISO interface design, modular structure for easy installation and maintenance
  • ◆ High-purity seamless gas path components to avoid secondary contamination

Applications

Application Background
◆ Semiconductor wafer fabs
◆ Third-generation semiconductor epitaxy workshops
◆ LED & optoelectronic manufacturing plants
◆ Flat panel display production lines

Suitable Occasions

Nitrogen

Special gas cylinder cabinet area

Nitrogen

Central bulk gas supply station

Nitrogen

Gas replacement and pre-process purging stations

Nitrogen

MOCVD, etching, thin-film deposition process front-end

Suitable for Fluids

Application Background
◆ Ultra-high purity bulk gases: N₂, O₂, Ar, H₂, CDA
◆ Inert carrier gases for MO source delivery
◆ Low-toxicity purging auxiliary gases

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It can achieve continuous and uninterruptedsafe supply of electronic-grade specialtygases at high flow rates and is mainlycontrolled by PLC. The touch screen is thehuman-machine interface.

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