CQC

This integrated CQC cabinet conducts ppb-level purity monitoring after gas purifiers. With multi-safety design and dual layout options, it uses multiple analytical technologies for real-time impurity tracking. Supporting data interlock & traceability, it serves semiconductor, PV and display factories for high-purity bulk gases like N₂, O₂, H₂ and CDA.

Background

Integrated Complex Equipment

Background

Equipment

Characteristics

◆ Integrated end-point continuous monitoring unit installed downstream of gas purifiers
◆ Ultra-high precision trace impurity detection with ppb-level measuring resolution
◆ Complete integrated cabinet solution with ultra-clean high-purity gas pipeline modules
◆ Multi-layer intrinsic safety design targeting hydrogen and flammable process gas
◆ Two flexible configuration modes: independent single-gas analyzers or mass spectrometer combined layout

Main Features

Feature 1

Real-time tracking of gas purity fluctuation and purifier performance degradation

Feature 1

Full set of built-in safety components: leak detectors, emergency shut-off valves and forced ventilation

Feature 1

Multiple analytical technologies (electrochemical, laser spectroscopy, chromatography) for multi-impurity testing

Feature 1

Stable long-term operation with low maintenance frequency, optional low-consumption mass spec layout

Feature 1

Standard communication interfaces for data upload, alarm interlock and production traceability

Feature 1

Unified internal gas sampling ports for convenient calibration and routine inspection

Applications

Application Background

◆ Semiconductor wafer fabrication fabs

◆ Flat-panel display & LED manufacturing workshops

◆ Photovoltaic cell production lines

◆ Ultra-high purity electronic gas supply stations

Suitable Occasions

Nitrogen

Terminal quality monitoring station of bulk gas delivery pipelines in cleanrooms

Nitrogen

Post-purifier outlet monitoring for 7N+ ultra-pure process gas supply

Nitrogen

Mass gas central stations requiring full-cycle impurity traceability

Nitrogen

Advanced process zones with strict ppb-grade impurity control standards

Suitable for Fluids

Application Background

◆ Ultra-high purity bulk electronic gases: N₂, O₂, Ar, He, H₂

◆ Clean dry compressed air (CDA) for semiconductor manufacturing

◆ Non-corrosive inert auxiliary process gases for microelectronics production

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