GC

GC(Gas Cabinet) is PLC-controlled with 5.7” touchscreen HMI and built-in safety interlocks. Equipped with premium high-purity valves, filters and pressure sensors, it supports manual purging, auto cylinder switch and alarm-triggered emergency shutoff for flammable, corrosive and toxic specialty gases. It serves semiconductor fabs for continuous high-purity gas supply of SiH₄, NH₃, NF₃ and more, with standard dual-cylinder cabinet and optional valves & pipeline heaters.

Background

Integrated Complex Equipment

Background

Equipment

Characteristics

◆ Adopts PLC control with digital display as the interface and illuminated push-buttons for operation
◆ Equipped with pressure sensors, pneumatic valves, excess flow meters and other components to ensure safe and effective operation
◆ Built-in safety interlock logic in the PLC program
◆ Matched with properly selected and arranged high-purity valves
◆ Meets requirements for continuous supply and high purity of specialty gases in production processes
◆ Guarantees normal plant operation and personnel safety

Main Features

Feature 1

Designed for single-cylinder supply of hazardous gases

Feature 1

Includes manual purging function

Feature 1

Provides automatic emergency shutoff upon activation of preset alarm signals

Applications

Application Background

◆ Production processes requiring continuous supply and high purity of specialty gases

◆ Plant operations where hazardous gas handling and personnel safety are critical

Suitable Occasions

Nitrogen

Single-cylinder supply scenarios for hazardous gases (flammable, corrosive, toxic)

Nitrogen

Processes requiring manual purging capability

Nitrogen

Environments needing automatic emergency shutoff triggered by preset alarm signals

Suitable for Fluids

Application Background

◆ SiH4

◆ NH3

◆ HCL

◆ CL2

◆ HBr,etc.

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