GR

This semi-open GR Gas Rack delivers steady inert low-risk gas supply with simplified, cost-saving layout. Equipped with pressure regulation, multi-channel nitrogen utility and vent interfaces, it adopts manual cylinder switching without auto-purge. Ideal for semiconductor, PV and biopharma cleanrooms, it serves auxiliary bulk gases like N₂, Ar, He and CDA for low-hazard distribution stations.

Background

Integrated Complex Equipment

Background

Equipment

Characteristics

◆ Semi-open frame gas supply unit dedicated to inert and low-risk process gas delivery
◆ Simplified cabinetless structure with fewer safety sensors compared with fully enclosed gas cabinets
◆ Manual-dominant cylinder switching workflow without automatic purge cycle function
◆ Compact layout for centralized cylinder storage and stable continuous gas output
◆ Matched with complete supporting utility interfaces including GN2, PN2, power and vent ports

Main Features

Feature 1

Cost-effective lightweight design with intuitive exposed pipeline for easy on-site operation & maintenance

Feature 1

Built-in pressure regulating, sealing and pipeline pressure retention assemblies for steady gas supply

Feature 1

Independent nitrogen supply branches for valve actuation, cabinet positive pressure protection and cylinder replacement purging

Feature 1

Optional heating modules for cylinders and pipeline surfaces with separated UPS control power and mains power supply

Feature 1

Vent pipeline integration for safe exhaust of residual process gas during maintenance cycles

Applications

Application Background

◆ Semiconductor wafer fabrication fabs

◆ Photovoltaic and LED component manufacturing

◆ Optical fiber and flat-panel display production

◆ Biopharmaceutical precision laboratory workshops

Suitable Occasions

Nitrogen

Cleanroom intermediate gas distribution stations for auxiliary bulk process gas

Nitrogen

Production lines requiring continuous supply of non-toxic, non-flammable inert gas

Nitrogen

Process zones with low hazard gas standards and regular manual cylinder exchange

Nitrogen

Factory utility corridors connecting central gas source to equipment-side VMP/VMB panels

Suitable for Fluids

Application Background

◆ Inert low-risk bulk process gases: Nitrogen (N₂), Argon (Ar), Helium (He)

◆ Clean dry compressed air (CDA), oxygen and other non-corrosive, non-pyrophoric auxiliary industrial gases

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