VMB

VMB is a PLC-controlled gas distribution system with touchscreen, safety interlocks and automatic shutoff, delivering safe, continuous supply of hazardous specialty gases.

Background

Integrated Complex Equipment

Background

Equipment

Characteristics

◆ Adopts PLC control with a touchscreen human-machine interface.
◆ Equipped with pressure sensors, pneumatic valves, and other components for safe and efficient operation.
◆ Built-in safety interlock functions programmed in the PLC.
◆ Features properly selected and laid-out high-purity valves.
◆ Ensures continuous supply and high purity of specialty gases in production processes.
◆ Guarantees stable plant operation and personnel safety.

Main Features

Feature 1

Supports manual purge function.

Feature 1

Provides automatic safety shut-off in emergencies (activated by preset alarm signals).

Feature 1

Push-compact touchscreen type design.

Applications

Application Background

◆ Semiconductor manufacturing processes

◆ Processes requiring continuous, high-purity specialty gas supply

◆ Environments handling hazardous gases

Suitable Occasions

Nitrogen

Scenarios requiring continuous supply of hazardous specialty gases

Nitrogen

Processes needing manual purging capability

Nitrogen

Environments requiring automatic safety shutoff triggered by preset alarms

Suitable for Fluids

Application Background

◆ Flammable/explosive gases (e.g., SiH₄, PH₃, B₂H₆, CH₄, CO)

◆ Corrosive gases (e.g., HCl, Cl₂, HBr, HF, WF₅, SiH₂Cl₂, BCl₃)

◆ Toxic gases (e.g., NH₃, AsH₃, NF₃, SiF₄, C₅F₈, CH₃F, CiF₃)

◆ Specialty mixtures (e.g., F₂/Kr/Ne)

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