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Shutboy

Shutboy clamps cylinder handwheels for local & remote auto shut-off, explosion-proof and linked to leak/fire alarms. It secures flammable, corrosive electronic gases inside gas cabinets.

Home Facility CAC Shutboy
Background
Integrated Complex Equipment
Background Equipment

Characteristics

  • ◆ Clamp-type actuator directly mounted on cylinder valve handwheel, no alteration to original cylinder valve
  • ◆ Dual control mode: local manual knob & remote automatic interlock signal
  • ◆ Intrinsically explosion-proof design for flammable gas environments
  • ◆ Linked with leak detector, wind pressure sensor and fire alarm system
  • ◆ Fast valve closing response to block gas source in emergencies

Applications

Application Background
◆ Advanced semiconductor wafer fabrication
◆ Third-generation semiconductor MOCVD factories
◆ Micro LED & optoelectronic thin-film workshops
◆ Laboratory hazardous high-purity gas stations

Suitable Occasions

Nitrogen

Inside toxic/flammable gas cylinder cabinets

Nitrogen

Bulk hydrogen and silane storage areas

Nitrogen

All process front-end gas supply stations with safety interlock requirements

Nitrogen

Fire and leakage monitoring zones of gas delivery system

Suitable for Fluids

Application Background
◆ Flammable & explosive gases: H₂, silane, germane
◆ Toxic and corrosive semiconductor specialty gases
◆ Ultra-high purity inert bulk gases
◆ Volatile organometallic MO source carrier gases

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It can achieve continuous and uninterruptedsafe supply of electronic-grade specialtygases at high flow rates and is mainlycontrolled by PLC. The touch screen is thehuman-machine interface.

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