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Background
Integrated Complex Equipment
Background Equipment

Characteristics

  • Spiral flexible structure made of high-grade stainless steel with electro-polished & passivated inner surface for ultra-high cleanliness
  • Elastic bending design absorbs mechanical displacement and vibration to avoid pipeline rupture or loose joints during cylinder replacement
  • All-metal sealed end connections with ultra-low leakage rate, no polymer gaskets causing secondary contamination
  • Smooth inner bore reduces turbulence and flow fluctuation, stabilizing gas delivery concentration for precise process control
  • Durable construction lowers regular leak-check frequency compared with common plastic hoses

Applications

Application Background
Semiconductor wafer manufacturing fabs
Third-generation semiconductor epitaxy workshops
LED, Micro-LED and optoelectronic production lines
Flat panel display & photovoltaic cell factories

Suitable Occasions

Nitrogen

Flexible linking between gas cylinders, pressure regulators and gas panels

Nitrogen

Connection between purge valve manifolds and gas distribution boxes

Nitrogen

Gas cabinet internal piping for cylinder replacement maintenance

Nitrogen

Front-end delivery pipelines for CVD, etching and doping processes

Suitable for Fluids

Application Background
Ultra-high purity inert bulk gases: N₂, Ar, O₂, CDA
Pyrophoric & doping specialty gases: silane, phosphine, germane
Mildly corrosive electronic process gases
Carrier gases for organometallic MO source vapor transportation

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