BSGS

BSGS(Bulk Specialty Gas System) is a PLC-based fully automatic high-flow bulk specialty gas supply system equipped with touchscreen HMI and integrated safety interlock logic. Configured with high-purity valves, precision filters and pressure sensors, it enables continuous, fail-safe delivery of ultra-high-purity process gases. Designed for centralized gas distribution in semiconductor, TFT, photovoltaic and LED fabs, it supports SiH₄, NF₃, NH₃, N₂O, HCl and CO₂, featuring a standard dual-cylinder gas cabinet with optional auxiliary valves and pipeline heaters.

Background

Integrated Complex Equipment

Background

Equipment

Characteristics

◆ Fully automatic high-flow specialty gas supply system
◆ PLC-controlled with touch screen human-machine interface (HMI)
◆ Built-in safety interlock logic in the PLC program
◆ Designed for stable, safe and fail-safe gas delivery
◆ Ensures continuous gas supply and high gas purity
◆ Guarantees smooth plant operation and personnel safety

Main Features

Feature 1

Equipped with pressure sensors, pneumatic valves, mass flow meters and other precision components.

Feature 1

Supports continuous, high-flow and fail-safe delivery of electronic specialty gases.

Feature 1

Supports continuous, high-flow and fail-safe delivery of electronic specialty gases.

Feature 1

Integrated safety interlock logic prevents unsafe conditions.

Applications

Application Background

◆ Semiconductor manufacturing plants

◆ TFT/LCD panel factories

◆ Photovoltaic (PV) production facilities

◆ LED manufacturing plants

Suitable Occasions

Nitrogen

Centralized gas supply systems for specialty process gases

Nitrogen

Production processes requiring continuous, high-purity gas supply

Nitrogen

Mass production environments requiring stable high-flow gas delivery

Suitable for Fluids

Application Background

◆ SiH₄

◆ NF₃

◆ NH₃

◆ N₂O

◆ HCl

◆ CO₂

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