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Cylinder-Guard

Cyl-Guard adopts mechanical interlock to stop wrong gas connection, with visible status signs. It cuts joint leakage for toxic, flammable specialty gas cylinders in chip and epitaxy workshops.

Home Facility CAC Cylinder-Guard
Background
Integrated Complex Equipment
Background Equipment

Characteristics

  • ◆ Mechanical interlock structure with differentiated card slots for different gas types
  • ◆ Visual "Open / Closed" status label for quick on-site inspection
  • ◆ Built-in sealing protection to reduce leakage risk during cylinder connection
  • ◆ Mandates standardized operation sequence to skip illegal direct cylinder opening
  • ◆ Compact size, directly mounted on cylinder valve outlet without pipeline modification

Applications

Application Background
◆ Semiconductor chip factories
◆ MOCVD gallium nitride epitaxy workshops
◆ Compound semiconductor production lines
◆ Toxic specialty gas distribution stations

Suitable Occasions

Nitrogen

Outlet of all hazardous gas cylinders

Nitrogen

Gas mixing and pre-treatment stations

Nitrogen

On-site cylinder replacement operation area

Nitrogen

Processes with flammable, corrosive and pyrophoric gas media

Suitable for Fluids

Application Background
◆ Pyrophoric gases: silane, disilane
◆ Toxic & corrosive gases: phosphine, arsine, chlorine
◆ Oxidizing/reducing specialty process gases
◆ High-purity doping mixed electronic gases

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It can achieve continuous and uninterruptedsafe supply of electronic-grade specialtygases at high flow rates and is mainlycontrolled by PLC. The touch screen is thehuman-machine interface.

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