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Valve Manifold

This integrated valve manifold combines shut-off, balance and purge valves to reduce leakage points. With compact high-purity flow paths and all-metal seals, it fits semiconductor, petrochemical factories. For transmitter measurement, gas cabinet purging and equipment gas control, it handles inert, corrosive and toxic specialty gases.

Home Facility CAC Valve Manifold
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Integrated Complex Equipment
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Characteristics

  • ◆ Modular integrated multi-valve structure combining shut-off, balance, purge and exhaust valves to cut pipeline connection points and leakage risks
  • ◆ Compact monoblock design with high-purity seamless internal flow channels, available in 2/3/5-valve configurations
  • ◆ All-metal sealing joints with ultra-low helium leak rate, supporting threaded, face-seal and compression connections
  • ◆ Optional built-in sensor ports and ESD emergency cut-off ports for independent equipment gas control
  • ◆ Available in low/high pressure grades, with corrosion-resistant stainless steel or alloy body material

Applications

Application Background
◆ Semiconductor wafer & optoelectronic manufacturing fabs
◆ Third-generation semiconductor epitaxy production lines
◆ Petrochemical, power and industrial automation plants
◆ Fire protection and hydraulic & pneumatic control systems

Suitable Occasions

Nitrogen

Front-end piping of pressure & differential pressure transmitters for flow and liquid level measurement

Nitrogen

Gas cabinet pipeline for cylinder replacement purging and residual medium exhausting

Nitrogen

Branch pipeline terminals for independent gas supply control of single process equipment

Nitrogen

Calibration, maintenance and online blowdown without interrupting production

Suitable for Fluids

Application Background
◆ Ultra-high purity inert process gases: N₂, Ar, O₂, clean dry air
◆ Toxic, corrosive and pyrophoric specialty electronic gases
◆ General industrial liquid media for pressure detection
◆ Carrier gases for organometallic MO source vapor delivery

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It can achieve continuous and uninterruptedsafe supply of electronic-grade specialtygases at high flow rates and is mainlycontrolled by PLC. The touch screen is thehuman-machine interface.

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