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GAS LINE

This high-purity gas line adopts smooth treated seamless metal tubes, orbital welded in cleanrooms with all-metal leak-proof joints. Optional double jacket & heat tracing fit hazardous gas. For semiconductor, optoelectronic fabs, it serves etching, deposition processes, conveying bulk inert, pyrophoric, corrosive and MO carrier gases.

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Background
Integrated Complex Equipment
Background Equipment

Characteristics

  • ◆ Manufactured from high-purity seamless metal tubing with ultra-smooth inner surface treatment to minimize particle retention and gas adsorption
  • ◆ Full orbital welding construction completed inside high-grade cleanrooms with dedicated deoxidation and precision cleaning processes
  • ◆ Integrated all-metal sealing connection structure with ultra-low leakage rate to avoid secondary contamination from polymer gaskets
  • ◆ Modular prefabrication scheme with customized anti-collision fixtures and standardized welding tooling for stable consistent quality
  • ◆ Optional double containment jacket structure and heat tracing assembly for high-risk or constant-temperature gas delivery

Applications

Application Background
◆ Semiconductor wafer fabrication factories
◆ Third-generation semiconductor epitaxy production workshops
◆ LED, Micro LED and optoelectronic component manufacturing lines
◆ Flat-panel display and photovoltaic cell production plants

Suitable Occasions

Nitrogen

Whole gas delivery network linking gas cabinets, VMB and process equipment

Nitrogen

High-purity gas supply pipelines for deposition, etching and ion implantation processes

Nitrogen

Hazardous pyrophoric, toxic and corrosive specialty gas transmission routes

Nitrogen

Pre-purging, vacuum foreline and gas circulation auxiliary pipeline zones

Suitable for Fluids

Application Background
◆ Ultra-high purity bulk inert gases: N₂, Ar, O₂, H₂ and clean dry air
◆ Pyrophoric & doping electronic specialty gases: silane, phosphine, germane
◆ Corrosive process gases: chlorine, hydrogen bromide, hydrogen chloride
◆ Carrier gases for organometallic MO source vapor delivery

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It can achieve continuous and uninterruptedsafe supply of electronic-grade specialtygases at high flow rates and is mainlycontrolled by PLC. The touch screen is thehuman-machine interface.

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