Main Features
High-performance vaporization module to produce homogeneous saturated vapor and reduce concentration deviation
Active linear liquid level sensor paired with auto-refill system to keep constant precursor output concentration
High-precision closed-loop thermal control to restrain temperature drift and avoid unstable vapor supply
Complete safety interlock system: exhaust monitoring, rate-of-rise fire detection, pressure interlock and leak-proof sealed cabinet doors
Expandable optional modules: remote drainage & chemical recovery pipeline, customizable carrier gas manifold, integrated auxiliary chiller
Multi-stage alarm protection against overheating, overpressure and low liquid level, enabling unmanned factory operation
