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TCS BUBBLER

TCS Bubbler delivers controlled TCS vapor for epitaxy via hydrogen bubbling, with PLC control, real-time monitoring, and tool interlock safety.

Home Process Tools LIQUID TOOLS TCS BUBBLER
Background
Integrated Complex Equipment
Background Equipment

Characteristics

  • ◆ Precise process control: Uses hydrogen carrier gas to bubble TCS liquid at constant temperature, generating process gas with controllable flow rates.
  • ◆ PLC-based system: Controlled by Omron/Siemens PLC with a 10-inch color touchscreen HMI for intuitive operation.
  • ◆ Safety & monitoring: Supports interlock connection with production tools, real-time equipment status display, and user permission management.
  • ◆ Flexible bubbler options: Available in 4L and 14L volumes, with operating pressure up to 4 bar (design pressure 10 bar).
  • ◆ Utilities compatibility: Requires 7 barg pneumatic supply, exhaust (150 m³/hr), and UPS power (110/240VAC, 1kVA); optional cooling water support.

Main Features

Feature 1

Generates controlled-flow process gas for epitaxy tools using hydrogen as carrier gas.

Feature 1

Constant-temperature bubbler design for uniform TCS vaporization.

Feature 1

Real-time monitoring of valve status and system pressure via touchscreen.

Feature 1

Supports optional Ethernet communication for data exchange with host systems.

Feature 1

Customizable user permission levels for secure operation.

Applications

Application Background
◆ Semiconductor manufacturing, specifically epitaxy processes.
◆ Industries using Trichlorosilane (TCS) in silicon epitaxy deposition.

Suitable Occasions

Nitrogen

Epitaxy tool processes requiring controlled, stable delivery of TCS-based process gas.

Nitrogen

Semiconductor fabs with automated, interlocked production systems.

Suitable for Fluids

Application Background
◆ Process liquid: TCS (Trichlorosilane)
◆ Carrier gas: Hydrogen (H₂)

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It can achieve continuous and uninterruptedsafe supply of electronic-grade specialtygases at high flow rates and is mainlycontrolled by PLC. The touch screen is thehuman-machine interface.

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